My rough preliminary list:
1 Solaris (1972)
2 Videodrome (1983)
3 2001: A Space Odyssey (1968)
4 Alien (1979)
5 Brazil (1985)
6 Alphaville (1965)
7 The Invisible Man (1933)
8 Threads (1984)
9 A Trip to the Moon (1902)
10 The Holy Mountain (1973)
11 A Clockwork Orange (1971)
12 The Day the Earth Stood Still (1951)
13 Repo Man (1984)
14 Blade Runner (1982)
15 Frankenstein (1931)
16 Silent Running (1972)
17 Melancholia (2011)
18 Hardware (1990)
19 Stalker (1979)
20 The Fly (1986)
21 Shivers (1975)
22 Tetsuo: The Iron Man (1989)
23 Beyond the Black Rainbow (2011)
24 Delicatessen (1991)
25 Fantastic Planet (1973)
26 The Terminator (1984)
27 Tron (1982)
28 The Thing (1982)
29 Invasion of the Body Snatchers (1978)
30 Moon (2009)
31 Krull (1983)
32 Planet of the Vampires (1965)
33 Flesh for Frankenstein (1973)
34 Quatermass and the Pit (1967)
35 Flash Gordon (1980)
36 The Prestige (2006)
37 The Bed Sitting Room (1969)
38 Bride of Frankenstein (1935)
39 Southland Tales (2007)
40 Demon Seed (1977)
41 Invasion of the Body Snatchers (1956)
42 The Incredible Shrinking Man (1957)
43 The Last Man on Earth (1964)
44 Village of the Damned (1960)
45 Metropolis (1927)
46 Prince of Darkness (1987)
47 Re-Animator (1985)
48 A Boy and His Dog (1975)
49 Island of Lost Souls (1933)
50 The Thing from Another World (1951)
51 Altered States (1980)
52 Miracle Mile (1988)
53 Event Horizon (1997)
54 From Beyond (1986)
55 The Revenge of Frankenstein (1958)
56 Woman in the Moon (1929)
57 La Jetée (1962)
58 World on a Wire (1973)
59 Lifeforce (1985)
60 Predator (1987)
61 RoboCop (1987)
62 Total Recall (1990)
63 They Live (1988)
64 The Hidden (1987)
65 The Stuff (1985)
66 Her (2013)
67 Frankenstein Created Woman (1967)
68 God Told Me To (1976)
69 Quatermass 2 (1957)
70 Jurassic Park (1993)
71 Ghostbusters (1984)
72 Gandahar (1988)
73 Young Frankenstein (1974)
74 The Road Warrior (1981)
75 The City of Lost Children (1995)
76 The Man Who Fell to Earth (1976)
77 Dark Star (1974)
78 Donnie Darko (2001)
79 2019 - After the Fall of New York (1983)
80 Scanners (1981)
81 The Blob (1988)
82 Eternal Sunshine of the Spotless Mind (2004)
83 The Matrix (1999)
84 Children of the Damned (1963)
85 Liquid Sky (1982)
86 On the Silver Globe (1988)
87 Primal Impulse (1975)
88 Xtro (1983)
89 Forbidden Zone (1982)
90 The Asphyx (1973)
91 The Quatermass Xperiment (1955)
92 The Dead Zone (1983)
93 Kin-Dza-Dza (1986)
94 Dark City (1998)
95 Turkey Shoot (1982)
96 Prey (1978)
97 Timecrimes (2007)
98 Forbidden Planet (1956)
99 X: The Man with the X-Ray Eyes (1963)
100 1984 (1984)
A few I'm not sure about... Ghostbusters for instance. Whilst it undoubtedly has sci-fi overtones it looks a little out of place (as do a few others).
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